Young Joon Cho Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Young Joon Cho returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1In situ control of oxygen vacancies in TiO2 by atomic layer deposition for resistive switching devices
2Plasma enhanced atomic layer deposition of SrTiO3 thin films with Sr(tmhd)2 and Ti(i-OPr)4
3Plasma nitridation of atomic layer deposition (ALD) Al2O3 by NH3 in plasma-enhanced chemical vapor deposition (PECVD) for silicon solar cell