S. Yamakoshi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by S. Yamakoshi returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Electron channel mobility in silicon-doped Ga2O3 MOSFETs with a resistive buffer layer
2Epitaxially grown crystalline Al2O3 interlayer on β-Ga2O3 (010) and its suppressed interface state density
3Field-Plated Ga2O3 MOSFETs With a Breakdown Voltage of Over 750 V