Your search for plasma enhanced atomic layer deposition publications authored by Michael A. Mastro returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic layer epitaxy for quantum well nitride-based devices|
|2||Epitaxial growth of AlN films via plasma-assisted atomic layer epitaxy|
|3||Perspectives on future directions in III-N semiconductor research|
|4||Practical Challenges of Processing III-Nitride/Graphene/SiC Devices|
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