Michael A. Mastro Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Michael A. Mastro returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Practical Challenges of Processing III-Nitride/Graphene/SiC Devices
2Epitaxial growth of AlN films via plasma-assisted atomic layer epitaxy
3Perspectives on future directions in III-N semiconductor research
4Atomic layer epitaxy for quantum well nitride-based devices