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Michael A. Mastro Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Michael A. Mastro returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer epitaxy for quantum well nitride-based devices
2Perspectives on future directions in III-N semiconductor research
3Practical Challenges of Processing III-Nitride/Graphene/SiC Devices
4Epitaxial growth of AlN films via plasma-assisted atomic layer epitaxy