Your search for plasma enhanced atomic layer deposition publications authored by A. G. Chernikova returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Electron Transport Across Ultrathin Ferroelectric Hf0.5Zr0.5O2 Films on Si|
|2||Ferroelectric properties of full plasma-enhanced ALD TiN/La:HfO2/TiN stacks|
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