A. G. Chernikova Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by A. G. Chernikova returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Temperature controlled Ru and RuO2 growth via O* radical-enhanced atomic layer deposition with Ru(EtCp)2
2Ferroelectric properties of full plasma-enhanced ALD TiN/La:HfO2/TiN stacks
3Electron Transport Across Ultrathin Ferroelectric Hf0.5Zr0.5O2 Films on Si