Nozomu Hattori Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Nozomu Hattori returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||ZnO Thin Films Fabricated by Plasma-Assisted Atomic Layer Deposition|
|2||Comparison between ZnO films grown by plasma-assisted atomic layer deposition using H2O plasma and O2 plasma as oxidant|