Search 1536 plasma ALD publications by:
Search 1536 plasma ALD publications by:
Yuanshen Qi Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Yuanshen Qi returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
---|---|
1 | Role of temperature on structure and electrical properties of titanium nitride films grown by low pressure plasma enhanced atomic layer deposition |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |