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  • Plasma-Enhanced Atomic Layer Deposition
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A. I. Khrebtov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by A. I. Khrebtov returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Surface passivation of GaAs nanowires by the atomic layer deposition of AlN