Andre Ricard Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Andre Ricard returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1The role of active species in the N2 and N2-H2 RF afterglows on selective surface nitriding of ALD-grown TiO2 films