Suhyeon Park Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Suhyeon Park returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Carbon content control of silicon oxycarbide film with methane containing plasma|
|2||Remote Plasma Atomic Layer Deposition of SiNx Using Cyclosilazane and H2/N2 Plasma|