Ashwin Shankar Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Ashwin Shankar returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
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1 | Capacitance-voltage characteristics of gamma irradiated Al2O3, HfO2, and SiO2 thin films grown by plasma-enhanced atomic layer deposition |