Anil G. Khairnar Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Anil G. Khairnar returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1High Dielectric Constant ZrO2 Films by Atomic Layer Deposition Technique on Germanium Substrates
2Interfacial and electrical properties of Al2O3/HfO2 bilayer deposited by atomic layer deposition on GeON passivated germanium surface
3PEALD grown high-k ZrO2 thin films on SiC group IV compound semiconductor
4Structural and electrical properties of ultra-thin high-k ZrO2 film on nitride passivated Ge(100) prepared by PEALD