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An economical, compact inductively coupled plasma source.

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  • Plasma-Enhanced Atomic Layer Deposition
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Rafaiel A. Ovanesyan Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Rafaiel A. Ovanesyan returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Challenges in atomic layer deposition of carbon-containing silicon-based dielectrics
2Atomic layer deposition of silicon-based dielectrics for semiconductor manufacturing: Current status and future outlook
3Low-Temperature Conformal Atomic Layer Deposition of SiNx Films Using Si2Cl6 and NH3 Plasma
4Surface reactions of aminosilane precursors during N2 plasma-assisted atomic layer deposition of SiNx