Rafaiel A. Ovanesyan Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Rafaiel A. Ovanesyan returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Surface reactions of aminosilane precursors during N2 plasma-assisted atomic layer deposition of SiNx
2Low-Temperature Conformal Atomic Layer Deposition of SiNx Films Using Si2Cl6 and NH3 Plasma
3Challenges in atomic layer deposition of carbon-containing silicon-based dielectrics
4Atomic layer deposition of silicon-based dielectrics for semiconductor manufacturing: Current status and future outlook