R. Engeln Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by R. Engeln returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Innovative remote plasma source for atomic layer deposition for GaN devices
2Infrared and optical emission spectroscopy study of atmospheric pressure plasma-enhanced spatial ALD of Al2O3
3In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3