David Thompson Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by David Thompson returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Growth Characteristics and Film Properties of Cerium Dioxide Prepared by Plasma-Enhanced Atomic Layer Deposition|
|2||In situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxides|