Bruce Dunn Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Bruce Dunn returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Plasma enhanced atomic layer deposition of thin film Li1+xMn2-xO4 for realization of all solid-state 3D lithium-ion microbatteries