Christoph Janowitz Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Christoph Janowitz returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1In situ real-time and ex situ spectroscopic analysis of Al2O3 films prepared by plasma enhanced atomic layer deposition
2Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition