Peter Schindler Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Peter Schindler returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
2Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride
3Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
4Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition
5Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
6Plasma-enhanced atomic layer deposition of BaTiO3
7Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid