Peter Schindler Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Peter Schindler returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid
2Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride
3Plasma-enhanced atomic layer deposition of BaTiO3
4Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition
5Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
6Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
7Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation