Sungwoo Choi Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Sungwoo Choi returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Characteristics of ZrO2 gate dielectric deposited using Zr(t –butoxide) and Zr(NEt2)4 precursors by plasma enhanced atomic layer deposition method|
|2||Plasma-Enhanced Atomic-Layer Deposition of a HfO2 Gate Dielectric|