B. L. Williams Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by B. L. Williams returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-assisted atomic layer deposition of HfNx: Tailoring the film properties by the plasma gas composition
2Low resistivity HfNx grown by plasma-assisted ALD with external rf substrate biasing
3Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges