Artem I. Baranov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Artem I. Baranov returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
2Capacitance characterization of GaP/n-Si structures grown by PE-ALD
3n-GaP/p-Si Heterojunction Solar Cells Fabricated by PE-ALD
4Influence of PE-ALD of GaP on the Silicon Wafers Quality
5Influence of plasma on electrophysical properties of the GaP/n-Si isotype heterojunction grown by PE-ALD
6Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
7Study of GaP/Si Heterojunction Solar Cells