Dina H. Triyoso Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Dina H. Triyoso returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Evaluation of Low Temperature Silicon Nitride Spacer for High-k Metal Gate Integration
2Atomic Layer Deposition of SiN for spacer applications in high-end logic devices
3Challenges in spacer process development for leading-edge high-k metal gate technology