M. Spiridonov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by M. Spiridonov returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Electron Transport Across Ultrathin Ferroelectric Hf0.5Zr0.5O2 Films on Si