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An economical, compact inductively coupled plasma source.

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  • Plasma-Enhanced Atomic Layer Deposition
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Vladimir A. Gritsenko Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Vladimir A. Gritsenko returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Hydrogen radical enhanced atomic layer deposition of TaOx: saturation studies and methods for oxygen deficiency control