Sannian Song Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Sannian Song returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Phase-change properties of GeSbTe thin films deposited by plasma-enchanced atomic layer depositon |