Peng Fei Wang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Peng Fei Wang returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of RuO2 thin films on SiO2 using Ru(EtCp)2 and O2 plasma
2Ru Thin Film Formation Using Oxygen Plasma Enhanced ALD and Rapid Thermal Processing


Shortcuts



© 2014-2020 plasma-ald.com