Your search for plasma enhanced atomic layer deposition publications authored by Peng Fei Wang returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic layer deposition of RuO2 thin films on SiO2 using Ru(EtCp)2 and O2 plasma|
|2||Ru Thin Film Formation Using Oxygen Plasma Enhanced ALD and Rapid Thermal Processing|
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