Your search for plasma enhanced atomic layer deposition publications authored by Wooho Jeong returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic layer deposited HfO2/HfSixOyNz stacked gate dielectrics for metal-oxide-semiconductor structures|
|2||Atomic Layer Deposition of HfO2 Thin Films on Ultrathin SiO2 Formed by Remote Plasma Oxidation|
|3||Characteristics of Atomic-Layer-Deposited HfO2 Films by Using a Remote Plasma on Pre-Deposited Hf Metal Layer|
|4||Characteristics of Cobalt Thin Films Deposited by Remote Plasma ALD Method with Dicobalt Octacarbonyl|
|5||Characteristics of HfN films deposited by using remote plasma-enhanced atomic layer deposition|
|6||The effect of oxygen remote plasma treatment on ZnO TFTs fabricated by atomic layer deposition|
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