
F. T. Wagner Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by F. T. Wagner returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
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1 | Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma |