
Ø. S. Fjellvåg Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Ø. S. Fjellvåg returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
---|---|
1 | The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges |