Introducing Plasma ALD, LLC's first in-house product.

An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

Contact us for more information.


Ø. S. Fjellvåg Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ø. S. Fjellvåg returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges