J. L. van Hemmen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by J. L. van Hemmen returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Optimization of Plasma Enhanced Atomic Layer Deposition Processes for Oxides, Nitrides and Metals in the Oxford Instruments FlexAL Reactor
2Dielectric Properties of Thermal and Plasma-Assisted Atomic Layer Deposited Al2O3 Thin Films
3Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor
4Reaction mechanisms during plasma-assisted atomic layer deposition of metal oxides: A case study for Al2O3