J. L. van Hemmen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by J. L. van Hemmen returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma and Thermal ALD of Al2O3 in a Commercial 200mm ALD Reactor
2Optimization of Plasma Enhanced Atomic Layer Deposition Processes for Oxides, Nitrides and Metals in the Oxford Instruments FlexAL Reactor
3Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor
4Dielectric Properties of Thermal and Plasma-Assisted Atomic Layer Deposited Al2O3 Thin Films
5Reaction mechanisms during plasma-assisted atomic layer deposition of metal oxides: A case study for Al2O3