Your search for plasma enhanced atomic layer deposition publications authored by Yang Xia returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Low temperature depositions of GaN thin films by plasma-enhanced atomic layer deposition|
|2||TiN/AlN Nano Multilayers Film Fabricated by Plasma Enhanced Atomic Layer Deposition|
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