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S. Mutas Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by S. Mutas returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Atomic Layer Deposition of SiN for spacer applications in high-end logic devices |
| 2 | Evaluation of Low Temperature Silicon Nitride Spacer for High-k Metal Gate Integration |