S. Mutas Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by S. Mutas returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Atomic Layer Deposition of SiN for spacer applications in high-end logic devices
2Evaluation of Low Temperature Silicon Nitride Spacer for High-k Metal Gate Integration