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Virginia R. Anderson Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Virginia R. Anderson returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures
2Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods
3Atomic layer epitaxy for quantum well nitride-based devices
4Understanding the effect of nitrogen plasma exposure on plasma assisted atomic layer epitaxy of InN monitored by real time grazing incidence small angle x-ray scattering
5Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy
6Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering