December 2022 Stats

The publication database currently has 1663 entries.

204 Films

274 Precursors

78 Dep Hardware Sets

253 Characteristics

91 Theses

5104 Authors

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2021 Year in Review

Recent Database Additions

Plasma-Enhanced Atomic Layer Deposition of p-Type Copper Oxide Semiconductors with Tunable Phase, Oxidation State, and Morphology Investigation of hydrogen impurities in PE-ALD AlN thin films by IBA methods Control of ion energy during plasma enhanced atomic layer deposition: A new strategy for the modulation of TiN growth delay on SiO₂ Comparison of chemical stability and corrosion resistance of group IV metal oxide films formed by thermal and plasma-enhanced atomic layer deposition Comparison of AlF₃ thin films grown by thermal and plasma enhanced atomic layer deposition

Virginia R. Anderson Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Virginia R. Anderson returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Atomic layer epitaxy for quantum well nitride-based devices
2	Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy
3	Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures
4	Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering
5	Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods
6	Understanding the effect of nitrogen plasma exposure on plasma assisted atomic layer epitaxy of InN monitored by real time grazing incidence small angle x-ray scattering