Kwang-Man Lee Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Kwang-Man Lee returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Interface Properties of Nickel-silicide Films Deposited by Using Plasma-assisted Atomic Layer Deposition|
|2||Characteristics of SiOC(-H) Thin Films Prepared by Using Plasma-enhanced Atomic Layer Deposition|