Your search for plasma enhanced atomic layer deposition publications authored by D. V. Negrov returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Electron Transport Across Ultrathin Ferroelectric Hf0.5Zr0.5O2 Films on Si|
|2||Ferroelectric properties of full plasma-enhanced ALD TiN/La:HfO2/TiN stacks|
© 2014-2020 plasma-ald.com