Chun Min Zhang Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Chun Min Zhang returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|Ru Thin Film Formation Using Oxygen Plasma Enhanced ALD and Rapid Thermal Processing
|Atomic layer deposition of RuO2 thin films on SiO2 using Ru(EtCp)2 and O2 plasma