Shui-Yang Lien Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Shui-Yang Lien returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Chemical Reaction and Ion Bombardment Effects of Plasma Radicals on Optoelectrical Properties of SnO2 Thin Films via Atomic Layer Deposition
2Properties and Mechanism of PEALD-In2O3 Thin Films Prepared by Different Precursor Reaction Energy
3Effect of plasma power on the structural properties of tin oxide prepared by plasma-enhanced atomic layer deposition
4Deposition and Characterization of RP-ALD SiO2 Thin Films with Different Oxygen Plasma Powers
5Surface Passivation of Silicon Using HfO2 Thin Films Deposited by Remote Plasma Atomic Layer Deposition System
6Simulation and Fabrication of HfO2 Thin Films Passivating Si from a Numerical Computer and Remote Plasma ALD
7Influence of plasma power on deposition mechanism and structural properties of MoOx thin films by plasma enhanced atomic layer deposition