Kazuhiro Hirahara Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kazuhiro Hirahara returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1RT Atomic Layer Deposition of Al2O3 By Using Remote Plasma Excited Water Vapor
2Room-temperature atomic layer deposition of ZrO2 using tetrakis(ethylmethylamino)zirconium and plasma-excited humidified argon
3Reaction mechanism of room temperature HfO2 atomic layer deposition using remote plasma excited water and oxygen
4RT Atomic Layer Deposition of ZrO2 By Using Plasma Excited Water Vapor