Kazuhiro Hirahara Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kazuhiro Hirahara returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Reaction mechanism of room temperature HfO2 atomic layer deposition using remote plasma excited water and oxygen
2Room-temperature atomic layer deposition of ZrO2 using tetrakis(ethylmethylamino)zirconium and plasma-excited humidified argon
3RT Atomic Layer Deposition of Al2O3 By Using Remote Plasma Excited Water Vapor
4RT Atomic Layer Deposition of ZrO2 By Using Plasma Excited Water Vapor