Your search for plasma enhanced atomic layer deposition publications authored by Kazuhiro Hirahara returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Reaction mechanism of room temperature HfO2 atomic layer deposition using remote plasma excited water and oxygen|
|2||Room-temperature atomic layer deposition of ZrO2 using tetrakis(ethylmethylamino)zirconium and plasma-excited humidified argon|
|3||RT Atomic Layer Deposition of Al2O3 By Using Remote Plasma Excited Water Vapor|
|4||RT Atomic Layer Deposition of ZrO2 By Using Plasma Excited Water Vapor|
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