Nathan Nelson-Fitzpatrick Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Nathan Nelson-Fitzpatrick returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2|
|2||Atomic layer deposition of TiN for the fabrication of nanomechanical resonators|