Nathan Nelson-Fitzpatrick Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Nathan Nelson-Fitzpatrick returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Atomic layer deposition of TiN for the fabrication of nanomechanical resonators
2Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2