Jan Willem Maes Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jan Willem Maes returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Atomic Layer Deposition: An Enabling Technology for Microelectronic Device Manufacturing
2Evaluation of plasma parameters on PEALD deposited TaCN