Jan Willem Maes Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Jan Willem Maes returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Evaluation of plasma parameters on PEALD deposited TaCN |
| 2 | Atomic Layer Deposition: An Enabling Technology for Microelectronic Device Manufacturing |