Jacob L. Jones Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jacob L. Jones returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Influence of oxygen source on the ferroelectric properties of ALD grown Hf1-xZrxO2 films
2Effect of in situ hydrogen plasma on the ferroelectricity of hafnium zirconium oxide films
3Ferroelectric phenomena in Si-doped HfO2 thin films with TiN and Ir electrodes
4Thermal stability of antiferroelectric-like Al:HfO2 thin films with TiN or Pt electrodes
5The effects of layering in ferroelectric Si-doped HfO2 thin films
6TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO2 thin films