Your search for plasma enhanced atomic layer deposition publications authored by Chang Gyoun Kim returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Growth of amorphous zinc tin oxide films using plasma-enhanced atomic layer deposition from bis(1-dimethylamino-2-methyl-2propoxy)tin, diethylzinc, and oxygen plasma|
|2||Growth of tantalum nitride film as a Cu diffusion barrier by plasma-enhanced atomic layer deposition from bis((2-(dimethylamino)ethyl)(methyl)amido)methyl(tert-butylimido)tantalum complex|
|3||Highly-conformal nanocrystalline molybdenum nitride thin films by atomic layer deposition as a diffusion barrier against Cu|
|4||Plasma-Enhanced Atomic Layer Deposition of Ni|
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