Elena M. Echeverrı́a Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Elena M. Echeverrı́a returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Critical-point model dielectric function analysis of WO3 thin films deposited by atomic layer deposition techniques |