Jaehyoung Koo Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jaehyoung Koo returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Characteristics of ZrO2 gate dielectric deposited using Zr(t –butoxide) and Zr(NEt2)4 precursors by plasma enhanced atomic layer deposition method
2Effect of Nitrogen Incorporation in HfO2 Films Deposited by Plasma-Enhanced Atomic Layer Deposition
3Characteristics of Al2O3 Thin Films Deposited Using Dimethylaluminum Isopropoxide and Trimethylaluminum Precursors by the Plasma-Enhanced Atomic-Layer Deposition Method
4Plasma-Enhanced Atomic-Layer Deposition of a HfO2 Gate Dielectric
5ZrO2 Gate Dielectric Deposited by Plasma-Enhanced Atomic Layer Deposition Method
6Initial reaction of hafnium oxide deposited by remote plasma atomic layer deposition method