Rym Benaboud Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Rym Benaboud returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Low-Temperature Low-Resistivity PEALD TiN Using TDMAT under Hydrogen Reducing Ambient


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