Atsushi Ogura Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Atsushi Ogura returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Influence of Al2O3 layer insertion on the electrical properties of Ga-In-Zn-O thin-film transistors
2Evaluation of Stress Induced by Plasma Assisted ALD SiN Film
3Improvement of smooth surface of RuO2 bottom electrode on Al2O3 buffer layer and characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 capacitors
4Correlation between ferroelectricity and ferroelectric orthorhombic phase of HfxZr1-xO2 thin films using synchrotron x-ray analysis