Atsushi Ogura Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Atsushi Ogura returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Evaluation of Stress Induced by Plasma Assisted ALD SiN Film
2Improvement of smooth surface of RuO2 bottom electrode on Al2O3 buffer layer and characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 capacitors
3Influence of Al2O3 layer insertion on the electrical properties of Ga-In-Zn-O thin-film transistors