D. Pierreux Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by D. Pierreux returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3|
|2||Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties|