D. Pierreux Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by D. Pierreux returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3
2Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties