Rohit Galatage Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Rohit Galatage returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | The influence of surface preparation on low temperature HfO2 ALD on InGaAs (001) and (110) surfaces |