Yi-Jen Tsai Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yi-Jen Tsai returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
2	Double nitridation of crystalline ZrO2/Al2O3 buffer gate stack with high capacitance, low leakage and improved thermal stability
3	Impact of nitrogen depth profiles on the electrical properties of crystalline high-K gate dielectrics
4	Improved Electrical Properties of Crystalline ZrO2/Al2O3 Buffer Gate Stack with Double Nitridation
5	Suppression of interfacial layer in high-K gate stack with crystalline high-K dielectric and AlN buffer layer structure

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