Elisabeth Blanquet Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Elisabeth Blanquet returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Aluminum nitride thin films deposited by hydrogen plasma enhanced and thermal atomic layer deposition
2Low-Temperature Low-Resistivity PEALD TiN Using TDMAT under Hydrogen Reducing Ambient
3PEALD ZrO2 Films Deposition on TiN and Si Substrates
4Tetragonal Zirconia Stabilization by Metal Addition for Metal-Insulator-Metal Capacitor Applications