Aluminum nitride thin films deposited by hydrogen plasma enhanced and thermal atomic layer deposition

Type:
Journal
Info:
Surface & Coatings Technology 347 (2018) 181 - 190
Date:
2018-04-11

Author Information

Name Institution
L. TianGrenoble Alps University (UGA)
S. PontonGrenoble Alps University (UGA)
M. BenzGrenoble Alps University (UGA)
Alexandre CrisciGrenoble Alps University (UGA)
R. ReboudGrenoble Alps University (UGA)
G. GiustiSIL'TRONIX Silicon Technologies
Fabien VolpiGrenoble Alps University (UGA)
L. RapenneGrenoble Alps University (UGA)
Christophe ValléeGrenoble Alps University (UGA)
M. PonsGrenoble Alps University (UGA)
A. MantouxGrenoble Alps University (UGA)
C. JiménezGrenoble Alps University (UGA)
Elisabeth BlanquetGrenoble Alps University (UGA)

Films

Plasma AlN


Thermal AlN


Film/Plasma Properties

Characteristic: Plasma Species
Analysis: OES, Optical Emission Spectroscopy

Characteristic: Chemical Composition, Impurities
Analysis: EPMA, Electron Probe Micro Analyzer

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: GIXRD, Grazing Incidence X-Ray Diffraction

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: Electron Diffraction

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe

Substrates

SiC
Si(100)
BSG, BoroSilicate Glass

Keywords

Notes

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